Mechanical Micro-dissection by Microknife Using Ultrasonic Vibration and Ultra Fine Probe Sensor

Recently, research works on the bio-engineering actively carried out, and the useful tool for the micromanipulation is also developed. Purpose of this research is to develop the minute size knife for the cutting of the minute object such as the cell. In this paper, we report on the microknife that cuts o the object by using ultrasonic vibration of the sharp needle. We employed the multilayer piezoelectric actuator for generating the ultrasonic vibration for cutting. And we made the touch probe sensor for microknife by the PZT thin lm which is made by the hydrothermal method. We evaluated the performance of cutting and the touch probe sensor by the experiments.